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SECS(SEMI EQUIPMENT COMMUNICATIONS STANDARD 2)半导体设备通讯标准 GEM(Generic Equipment Model)定义了Fab中各个场景下设备行为及其所使用SECS消息。 GEM300也称为300mm标准,FAB是12寸设备的处理作业规范。主要包 8400 HighLine变频器适用于简单运动控制和定位任务的速度控制。 此外,其设计还符合生态设计指南EN IEC 61800-9-2标准的要求。 SECS(SEMI EQUIPMENT COMMUNICATIONS STANDARD 2)半导体设备通讯标准 GEM(Generic Equipment Model)定义了Fab中各个场景下设备行为及其所使用SECS消息。 GEM300也称为300mm标准,FAB是12寸设备的处理作业规范。主要包

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